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{title2=1998}

Primary source: https://www.iue.tuwien.ac.at/phd/kirchauer/node29.html

Relevant evidence: Resist dose contrast, equation 2.6.

Author: <Heinrich Kirchauer>.

Contrast and Important Properties by Heinrich Kirchauer

Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge / 2023 / Paper 1 / Section A(ii) / 3 / i / Solution

Contrast and Important Properties by Heinrich Kirchauer (1998)

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Contrast and Important Properties by Heinrich Kirchauer (1998)

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