Electron backscatter diffraction determines crystallographic information from electron diffraction patterns recorded in a scanning electron microscope. A scanned electron beam strikes a crystalline specimen, and the detector records backscattered-electron diffraction patterns. Their band geometry can be indexed against a crystal model to estimate local orientation and identify compatible phases.[ref]
What is Electron Backscatter Diffraction? by Oxford Instruments. Instrument developer’s EBSD principles and microstructure mapping
Repeating the measurement across a surface produces an orientation map that can reveal crystal grains, boundaries and changes associated with deformation or recrystallisation. Preparation and pattern quality matter: a map records successfully indexed information, so poor surface quality or an unsuitable structural model can create missing or misleading assignments. It complements chemical analysis rather than directly reporting elemental composition.
Articles by others on the same topic
Electron Backscatter Diffraction (EBSD) is a microstructural crystallography technique that is typically used in scanning electron microscopy (SEM) to analyze the crystallographic structure of materials at the nanoscale. The technique provides information about the orientation of individual grains in polycrystalline materials, allowing researchers to study grain structure, phase distribution, and defect characterization.