A physicist who helped develop photolithography for manufacturing small semiconductor devices. His oral history describes adapting photographic reduction and light-sensitive coatings to pattern transistors, motivated by the need to fit circuits into a restricted space. Transferring a reduced pattern to the device surface made reproducible small features possible and linked optical imaging with semiconductor fabrication.[ref]
Oral History of Jay W. Lathrop. pp. 4–6 and 8–9: photographic reduction, light-sensitive resist, masks and transistor fabrication
Articles by others on the same topic
There are currently no matching articles.