Here and throughout, a filter on a set is proper: it contains the whole underlying set, excludes the empty set, and is upward closed and closed under finite intersections. An improper filter cannot be extended to a proper ultrafilter.
Order the proper filter extensions of by inclusion. The union of a chain is again a proper filter on a set: any two members already occur in one member of the chain, where their intersection belongs; the empty set never appears. By Zorn lemma, take a maximal proper extension . If , adjoining must make the generated filter improper, so some has . Upward closure then gives . Exactly one of belongs to , proving the ultrafilter lemma.
Let be nonempty structures for a common first-order language, and let be an ultrafilter on the index set . In the ultraproduct , identify functions when ; interpret function symbols coordinatewise and relations by membership of their coordinate truth sets in . The Łoś theorem states, for every first-order formula ,
Changing representatives changes a coordinate truth set only outside a member of , so the definitions are well defined.
Prove the theorem by structural induction on formulas. An induction on terms gives , and therefore the required equivalence for atomic equality and relation formulas. For conjunction the truth set is an intersection, and a finite intersection belongs to a proper filter on a set exactly when each constituent does. For negation it is a complement, and the ultrafilter decides exactly one of a set and its complement. These prove the Boolean induction steps.
For the existential step, a witness in gives, by induction, a member of on which holds. It is contained in the coordinate existential truth set, so that set belongs to . Conversely, if
choose a coordinate witness for , and any element of the nonempty factor otherwise. Then the truth set of contains . Induction gives a witness in the ultraproduct. Universal quantification follows from negation and existence. This completes the actual proof of the Łoś theorem.
For the compactness theorem, take to be the set of finite subsets of , and choose a model of each such subset. The cones
are nonempty and satisfy . They generate a proper filter on a set, which extends to an ultrafilter by the proved lemma. For every , the coordinate truth set of contains . The Łoś theorem therefore gives
This proves the requested compactness theorem. In fact the same proof works without the countability restriction on the language.

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