Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge / 2018 / Paper 1 / Section A(ii) / 3 / ii

Let $O_1$ and $O_2$ be the open projected regions in the two layers. For normal, collimated rays, the transmitted opening is the intersectionAn upper particle blocks any lower-layer gap beneath its footprint. A translated layer can therefore reduce island size, suppress some islands or close the holes completely. If the projected openings coincide, an ideally registered second layer need not change the pattern at all. A rotated or differently registered layer can create a larger superperiod or a less regular pattern.

The additional height also increases the separation between some blocking edges and the substrate, making a finite angular source distribution more important. Deposition angle and layer separation then enter the projected aperture geometry. No unique double-layer pattern follows without specifying registry, orientation and source direction; the figure illustrates aligned and shifted possibilities instead of treating one as inevitable.