Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge / 2021 / Paper 1 / 3 / iii / a

A transmissive mask is placed in contact with the resist, or a small distance above it for proximity printing. Chromium-patterned glass or quartz is a typical mask. Illumination is normally collimated ultraviolet light, with refractive illumination optics used to prepare the beam.

There is no projection objective imaging a reduced mask pattern onto the resist: the mask shadows the resist approximately one-to-one. The finite gap in proximity printing introduces diffraction and limits edge sharpness; contact printing reduces that gap at the cost of mask wear and contamination risk.