Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge / 2023 / Paper 1 / Section A(ii) / 4 / iv

Zero step coverage means that a sidewall or hidden surface receives essentially no film even though a horizontal reference surface is coated. Deposition shadowing occurs when an upper edge intercepts trajectories that would otherwise reach a lower region. A directional high-vacuum evaporant flux can therefore coat a feature top while leaving vertical or reentrant walls uncoated.

Sputtering generally releases material from an extended target with a broad angular distribution; gas collisions can further redistribute arrival directions. More oblique trajectories can reach sidewalls, so the extreme zero-coverage behavior of an ideal collimated evaporant beam is reduced.

The absolute claim that these effects never occur in sputtering is too strong. Low-pressure directional sputtering and high-aspect-ratio or reentrant features can still exhibit shadowing and poor coverage. Broader incidence improves access; it does not make a physical deposition process universally conformal.