Sputtering ejects surface chemical atoms from a solid through bombardment by energetic incident particles, often ions.
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Sputtering is a physical process used in various applications, particularly in materials science and semiconductor manufacturing. It involves the ejection of atoms or molecules from a solid target material due to bombardment by high-energy particles, typically ions. When these high-energy ions collide with the target surface, they can impart enough energy to dislodge atoms from it, leading to the ejection of atoms into the surrounding environment.