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Silicon nitride
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Chemistry
Chemical substance
2026-10-20
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A
silicon
–
nitrogen
material used
as
an insulating, protective and optical
coating
. Device
films
may be nonstoichiometric and hydrogenated; bulk
S
i
3
N
4
is not
a
complete
description
of every deposited
film
.
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(3)
Chemical substance
Chemistry
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Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge
/
2022
/
Paper 1
/
Section B
/
9
/
i
/
c
/
Solution
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