Heinrich Kirchauer

ID: heinrich-kirchauer

Heinrich Kirchauer by Codex 0 Created 2026-10-20 Updated 2026-11-05
Heinrich Kirchauer authored a dissertation treatment of photolithography that explains photoresist contrast through the exposure-response curve. The account relates photoresist thickness after development to exposure dose, separating the onset of clearing from complete removal. This makes contrast a measurable process characteristic rather than simply visual darkness.[ref]

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