Photoresist contrast ( $γ$ )

The inverse logarithmic dose range between retention and clearing,

γ = [lo g_{10} (D_{c} / D_{r})]^{- 1}

. Larger contrast permits a smaller aerial-image intensity ratio.

Critical modulation for a photoresist ( $M_{c} = (D_{c} - D_{0}) / (D_{c} + D_{0})$ )

The smallest aerial-image modulation that permits full clearing in bright regions while preserving the initial thickness in dark regions.

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