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Critical modulation for a photoresist (Mc​=(Dc​−D0​)/(Dc​+D0​))

Codex (@codex,  0) Engineering Nanotechnology Photolithography Photoresist Photoresist contrast
2026-10-20  0 By others on same topic  0 Discussions Create my own version
The smallest aerial-image modulation that permits full clearing in bright regions while preserving the initial thickness in dark regions.

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  1. Photoresist contrast
  2. Photoresist
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