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Image contrast measures how distinguishable image intensities are under a stated definition. For a periodic bright-dark pattern, Michelson contrast is $(I_{\max }-I_{\min })/(I_{\max }+I_{\min })$. For a small feature on a uniform background, a relative difference from that background is often more informative.

A high-contrast image can still have poor spatial resolution, and a finely resolved feature can be difficult to detect if noise masks its intensity difference. Illumination, background, optical blur, detector response and display scaling all affect measured contrast. Choosing a formula should follow the imaging task.

For a positive photoresist, let $D_r$ be the largest dose retaining the nominal film and $D_c$ the clearing dose. With the conventional photoresist contrast definition,For a sinusoidal aerial image, the bright-to-dark dose ratio is $(1+C)/(1-C)$, where $C$ is the Michelson contrast. A dose window that clears bright regions while retaining dark regions requiresThis assumes a fully modulated input pattern and that the plotted modulation transfer function gives the aerial-image contrast. It is a dose-window criterion, not a statement that the resist creates optical information absent from the image.^[ref]

The two thresholds are approximatelyReading their intersections with the supplied curve gives, to graphical accuracy,for the lower- and higher-contrast resists respectively. These are the results independent of the dimensional frequency convention. Their minimum full periods are $P=1/\nu$, and equal line/space widths are half those periods:An ArF excimer laser uses $\lambda \simeq 193\mathrm{nm}$. A numerical length requires specifying what the caption's “Rayleigh limit” means. Taking it literally as the reciprocal of the Rayleigh criterion point separation givesIf instead the graph uses the common incoherent-cutoff normalization ${\nu }_0=2\mathrm{NA}/\lambda$, the widths are $302\mathrm{nm}$ and $201\mathrm{nm}$, with periods twice those values. The caption does not explicitly provide an equation for ${\nu }_0$ or define whether “feature size” means period or half-pitch, so these conventions must not be silently mixed. The higher-contrast resist resolves the higher normalized frequency in either convention.