A scanning transmission electron microscope makes an image by assigning a transmitted-electron signal to each position of a scanned probe. Its essential chain is electron source, probe-forming optics, scan system, thin specimen, transmitted-electron detectors and synchronized acquisition.
An electron gun and accelerating supply provide a stable beam of the chosen kinetic energy. Condenser lens optics and an aperture control probe current and convergence; the probe-forming objective lens focuses a small spot on the specimen. Alignment, focusing and astigmatism correction keep the probe usable across the field.
Scan coils deflect the probe in a raster. A stable specimen holder positions an electron-transparent region, and a high-vacuum column limits gas scattering and contamination. A bright-field transmission electron microscopy detector collects the central transmitted beam; an annular detector can select annular dark-field electron imaging, including high-angle annular dark-field imaging. Different angular selections give different contrasts, rather than a universal map of height.
Detector electronics, scan timing and a computer assign the collected signal to the corresponding image pixel. Spectrometers are useful additions but not essential to basic image formation. The post-specimen optics can adjust detector collection geometry; they do not set scan-image magnification in the same way as the projection lenses of conventional transmission imaging.
Figure 1.
Original schematics of scanned transmitted-electron imaging and contact-mode force feedback; panels show different instruments
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