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Hot-filament ionization gauge
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Physics
Concepts in physics
Physical phenomena
Vacuum
Vacuum gauges
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A
hot-filament
ionization
gauge (HFIG) is
a
type of
vacuum
gauge used to measure low
pressures
, typically in the range of
10
^-
3
to
10
^-
9
torr
(or mbar). It operates based on the
principle
of
ionization
created by
a
hot filament, which serves
as
the
electron
source.
Ancestors
(6)
Vacuum gauges
Vacuum
Physical phenomena
Concepts in physics
Physics
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