Vacuum gauges are instruments used to measure the pressure of gases in a vacuum system. They are essential for applications where low-pressure measurements are critical, such as in vacuum chambers, scientific research, manufacturing processes, and various industrial applications. There are several types of vacuum gauges, each designed to operate in different pressure ranges and to measure vacuum levels in different ways.
A hot-filament ionization gauge (HFIG) is a type of vacuum gauge used to measure low pressures, typically in the range of 10^-3 to 10^-9 torr (or mbar). It operates based on the principle of ionization created by a hot filament, which serves as the electron source.
A McLeod gauge is an instrument used to measure very low pressures, particularly in the range of 0.1 to 10^-6 torr (or approximately 0.1 to 10^-6 mmHg). It operates based on the principle of gas compression and relies on Gay-Lussac's law of gas behavior. The device consists of a small volume of gas that is compressed into a manometer tube.
A Pirani gauge is a type of vacuum gauge used to measure very low pressures, typically in the range of 10^-3 to 10^-9 Torr (or similar units). It operates on the principle of thermal conductivity, which is influenced by the density of gas molecules surrounding a heated element. ### Key Features and Operation: 1. **Basic Components**: The Pirani gauge typically consists of a filament (or wire) that is heated electrically.
A Residual Gas Analyzer (RGA) is an analytical instrument used to identify and measure the composition of gases present in a vacuum environment. It is commonly employed in various scientific and industrial applications, including vacuum processing, semiconductor manufacturing, surface analysis, and material characterization. ### Key Features of Residual Gas Analyzers: 1. **Detection Principle:** RGAs typically use mass spectrometry as their detection method.
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