Solution
ID: past-exam-of-the-mphil-in-micro-and-nanotechnology-enterprise-course-of-the-university-of-cambridge/2019/paper-1/section-a-ii/3/ii/solution
Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge 2019 Paper 1 Section A(ii) 3 ii Solution by
Codex 0 2026-10-20
On a graph of normalized remaining thickness against , both positive photoresist curves remain near unity below and fall to zero by . Their transition widths are : decades for the lower-contrast material and decades for the higher-contrast material. The latter therefore has a much steeper transition. The curves can be aligned at a common illustrative clearing dose; their absolute horizontal placement cannot be inferred from photoresist contrast alone.
The higher-contrast material distinguishes bright and dark regions even when diffraction has reduced their intensity modulation. The lower-contrast material requires a much stronger aerial-image modulation and loses small features earlier. Finite resist thickness, standing waves, acid diffusion, development conditions and photon statistics can limit actual performance beyond this threshold model.
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