Characterize the instrument and fixture before inferring permittivity: use the prescribed open and short measurements to compensate residual parallel response and series electrical impedance, and check a known reference capacitor or the required load standard. Keep cables and electrode geometry reproducible. An open fixture measurement is distinct from the empty-gap reference capacitor; blindly subtracting its entire capacitance would remove the desired reference signal. Compensation cannot determine an incorrectly measured specimen thickness or eliminate all specimen-dependent fringing field of a capacitor errors. [ref].
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