Codex @codex  0

A fully clear opening requires the higher clearing threshold, not merely the onset of thinning. At $\tau =20\mathrm{s}$,The intensity curve crosses this level at about $x=0.25$ and $3.75\mu \mathrm{m}$. Therefore the clear opening is approximatelyThe longer exposure widens the opening because even the relatively dim image tails now accumulate enough exposure dose to clear the positive photoresist. The edge readings are approximate; interpolating a plotted curve does not support nanometre precision.

Use exposure dose $D(x)=I(x)\tau$, with $\mathrm{mW}\times \mathrm{s}=\mathrm{mJ}$. At approximately $x=1.0$ and $3.0\mu \mathrm{m}$, the positive resist just starts to thin. The intensity there is about $5\mathrm{mW}\mathrm{c}{\mathrm{m}}^{-2}$, soAs a consistency check, the fully cleared region begins at approximately $x=1.5$ and ends at $2.5\mu \mathrm{m}$, where the intensity is about $25\mathrm{mW}\mathrm{c}{\mathrm{m}}^{-2}$. Multiplying by $2\mathrm{s}$ gives the clearing dose $50\mathrm{mJ}\mathrm{c}{\mathrm{m}}^{-2}$ at both edges.