Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge / 2019 / Paper 1 / Section B / 9 / ii / b

Use optical photolithography for the two masks and a resist profile compatible with the selected process. A controlled wet mesa etch or a calibrated reactive-ion etching process must pass completely through the p–n interface, with limited sidewall damage. Use profilometry or cross-section controls to verify depth and a test device to check leakage. For the front lift-off process, directional evaporation and an undercut resist profile discourage a continuous metal fence bridging the mask sidewall.

The cap-removal step requires a separately qualified selective etchant: its selectivity between gallium arsenide and the particular aluminium gallium arsenide alloy depends on alloy composition, chemistry and processing conditions. Establish etch rate and endpoint on a witness stack; a universal etch time cannot be inferred from a diagram without thicknesses. The front metal must resist that etchant. Back metallization and activation must establish an ohmic contact rather than an unintended rectifying junction. Verify specific contact resistance on test structures and avoid an anneal that degrades the p–n profile. The final dielectric can be deposited by a low-damage evaporation or other compatible thin-film method.