Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge / 2019 / Paper 1 / Section B / 9

From the illuminated side downward, the p-type gallium arsenide cap provides a low-resistance route to the front metal contact. It should remain beneath the contact grid but be removed from the optical aperture to reduce parasitic absorption. The wider-band gap p-type aluminium gallium arsenide window transmits much of the useful light and reduces front-surface recombination of carriers in the adjacent absorber. The optical-window and reduced-recombination rationale has a primary experimental basis in early heteroface devices.^[ref]

The p-type gallium arsenide emitter and n-type gallium arsenide base form the p-n junction. Absorbed photons generate electrons and electron holes; diffusion and the junction's electric field direct them toward the appropriate contacts. The n-type aluminium gallium arsenide back-surface-field layer provides a barrier to minority holes moving toward the substrate and reduces rear recombination. The n-type gallium arsenide substrate supports the epitaxial layers and conducts majority carriers to the rear contact.

The front metal must collect current with limited shading and the back metal provides the return contact. Interpreting the patterned hatched region as the optical antireflection coating, it reduces reflected light over the exposed window. Carrier selectivity, low recombination, low series resistance and low shading must work together; the equilibrium junction field alone is not a source of electrical energy.

One workable route uses two resist coatings and a metal-defined optical aperture. The following are eleven fabrication operations; exposure/development is grouped as one lithographic operation, and rear metallization includes its contact activation if required. Detailed cleaning, rinsing and inspection occur between compatible operations.

1. Spin-coat a first photoresist on the front surface to define a mesa mask.
2. Expose and develop that mask, retaining resist over the complete active-cell mesa, including its future front contacts.
3. Etch the exposed semiconductor through the p-type layers and slightly into the n-type base. This removes the unwanted junction around the cell and produces the lateral mesa step.
4. Strip the first photoresist, leaving a clean mesa with its cap intact.
5. Spin-coat a second photoresist suitable for the lift-off process.
6. Expose and develop openings at the intended front grid or contact pads, positioned safely inside the mesa edge.
7. Evaporate a p-contact metal stack onto the exposed gallium arsenide and resist. Au/Zn-based contact metallization is a conventional candidate, subject to doping and contact-resistance qualification.
8. Dissolve the second photoresist to lift off unwanted metal, leaving the front contacts on the cap.
9. Selectively remove the cap from the light-receiving aperture, using the front metal as a hard mask and the aluminium gallium arsenide window as the etch stop.
10. Deposit the rear n-contact metallization, for example a qualified AuGe/Ni/Au system, with an appropriate contact-activation anneal if required and compatible with the front contact.
11. Deposit an antireflection dielectric over the optical aperture through a mechanical shadow mask that keeps the contact pads accessible. Its refractive index and thickness are chosen for the target optical band.

The essential material changes are junction isolation at the mesa edge, metal retained on the front cap, cap removed only from the optical aperture, and a conducting rear contact. The metal systems and anneal are a process design, not compositions specified by the drawing. A workable design must also qualify the passivation of etched sidewalls and the front-contact surface preparation.

Use optical photolithography for the two masks and a resist profile compatible with the selected process. A controlled wet mesa etch or a calibrated reactive-ion etching process must pass completely through the p–n interface, with limited sidewall damage. Use profilometry or cross-section controls to verify depth and a test device to check leakage. For the front lift-off process, directional evaporation and an undercut resist profile discourage a continuous metal fence bridging the mask sidewall.

The cap-removal step requires a separately qualified selective etchant: its selectivity between gallium arsenide and the particular aluminium gallium arsenide alloy depends on alloy composition, chemistry and processing conditions. Establish etch rate and endpoint on a witness stack; a universal etch time cannot be inferred from a diagram without thicknesses. The front metal must resist that etchant. Back metallization and activation must establish an ohmic contact rather than an unintended rectifying junction. Verify specific contact resistance on test structures and avoid an anneal that degrades the p–n profile. The final dielectric can be deposited by a low-damage evaporation or other compatible thin-film method.

Mesa definition comes first so that the two front contacts can be aligned to an already isolated active area and can avoid damaged mesa edges. Keeping the cap until after metallization provides the intended contact surface and protects the window during the contact process. lift-off process must precede selective cap removal if the retained metal is to act as that etch mask. The cap etch must stop above the emitter rather than destroy the junction.

Rear metallization after the wet-processing stages avoids unnecessarily exposing the rear contact to their etchants. Contact activation precedes the optical coating where possible, because the anneal can alter dielectric properties and optical thickness. The antireflection coating goes last and leaves the pads uncoated for electrical access. The key ordering constraints are clean semiconductor before contacts, electrical isolation without severing the intended current path, selective aperture opening, and a thermal budget compatible with every retained layer. If a different metal or etchant requires a changed order, it must preserve these same functions.