Energy-dispersive X-ray spectroscopy (EDX or EDS) is an analytical technique used to determine the elemental composition of materials. It is frequently employed in conjunction with scanning electron microscopy (SEM) or transmission electron microscopy (TEM). ### Key Features of EDX: 1. **Principle of Operation**: EDX works by bombarding a sample with high-energy X-rays or electrons.
Articles by others on the same topic
Energy-dispersive X-ray spectroscopy identifies emitted X-rays by photon energy. An incident electron beam can create inner-shell vacancies; subsequent atomic transitions generate Characteristic X-rays whose energies help identify constituent chemical elements.
A calibrated detector produces an emission spectrum containing peaks and background. Comparing peak counts can support composition measurements, but absorption within the sample, overlapping lines and detector response affect the result. The brightness recorded by an electron microscope is a different observable from elemental identification by spectral lines. [ref]