As mentioned at youtu.be/16BzIG0lrEs?t=397 from Video "Applied Materials by Asianometry (2021)", originally the companies fabs would make their own equipment. But eventually things got so complicated that it became worth it for separate companies to focus on equipment, which then then sell to the fabs.
As of 2020 leading makers of the most important fab photolithography equipment.
Video 1. ASML: TSMC's Critical Supplier by Asianometry (2021) Source.
Video 2. How ASML Won Lithography by Asianometry (2021) Source.
First there were dominant Elmer and Geophysics Corporation of America dominating the market.
Then a Japanese government project managed to make Nikon and Canon Inc. catch up, and in 1989, when Ciro Santilli was born, they had 70% of the market.
youtu.be/SB8qIO6Ti_M?t=240 In 1995, ASML had reached 25% market share. Then it managed the folloging faster than the others:
Parent/predecessor of ASML.
Video 1. Applied Materials by Asianometry (2021) Source. They are chemical vapor deposition fanatics basically.