Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge / 2019 / Paper 1 / Section B / 9 / ii / c / Solution

Mesa definition comes first so that the two front contacts can be aligned to an already isolated active area and can avoid damaged mesa edges. Keeping the cap until after metallization provides the intended contact surface and protects the window during the contact process. lift-off process must precede selective cap removal if the retained metal is to act as that etch mask. The cap etch must stop above the emitter rather than destroy the junction.

Rear metallization after the wet-processing stages avoids unnecessarily exposing the rear contact to their etchants. Contact activation precedes the optical coating where possible, because the anneal can alter dielectric properties and optical thickness. The antireflection coating goes last and leaves the pads uncoated for electrical access. The key ordering constraints are clean semiconductor before contacts, electrical isolation without severing the intended current path, selective aperture opening, and a thermal budget compatible with every retained layer. If a different metal or etchant requires a changed order, it must preserve these same functions.