One workable route uses two resist coatings and a metal-defined optical aperture. The following are eleven fabrication operations; exposure/development is grouped as one lithographic operation, and rear metallization includes its contact activation if required. Detailed cleaning, rinsing and inspection occur between compatible operations.
1. Spin-coat a first photoresist on the front surface to define a mesa mask.
2. Expose and develop that mask, retaining resist over the complete active-cell mesa, including its future front contacts.
3. Etch the exposed semiconductor through the p-type layers and slightly into the n-type base. This removes the unwanted junction around the cell and produces the lateral mesa step.
4. Strip the first photoresist, leaving a clean mesa with its cap intact.
5. Spin-coat a second photoresist suitable for the lift-off process.
6. Expose and develop openings at the intended front grid or contact pads, positioned safely inside the mesa edge.
7. Evaporate a p-contact metal stack onto the exposed gallium arsenide and resist. Au/Zn-based contact metallization is a conventional candidate, subject to doping and contact-resistance qualification.
8. Dissolve the second photoresist to lift off unwanted metal, leaving the front contacts on the cap.
9. Selectively remove the cap from the light-receiving aperture, using the front metal as a hard mask and the aluminium gallium arsenide window as the etch stop.
10. Deposit the rear n-contact metallization, for example a qualified AuGe/Ni/Au system, with an appropriate contact-activation anneal if required and compatible with the front contact.
11. Deposit an antireflection dielectric over the optical aperture through a mechanical shadow mask that keeps the contact pads accessible. Its refractive index and thickness are chosen for the target optical band.
2. Expose and develop that mask, retaining resist over the complete active-cell mesa, including its future front contacts.
3. Etch the exposed semiconductor through the p-type layers and slightly into the n-type base. This removes the unwanted junction around the cell and produces the lateral mesa step.
4. Strip the first photoresist, leaving a clean mesa with its cap intact.
5. Spin-coat a second photoresist suitable for the lift-off process.
6. Expose and develop openings at the intended front grid or contact pads, positioned safely inside the mesa edge.
7. Evaporate a p-contact metal stack onto the exposed gallium arsenide and resist. Au/Zn-based contact metallization is a conventional candidate, subject to doping and contact-resistance qualification.
8. Dissolve the second photoresist to lift off unwanted metal, leaving the front contacts on the cap.
9. Selectively remove the cap from the light-receiving aperture, using the front metal as a hard mask and the aluminium gallium arsenide window as the etch stop.
10. Deposit the rear n-contact metallization, for example a qualified AuGe/Ni/Au system, with an appropriate contact-activation anneal if required and compatible with the front contact.
11. Deposit an antireflection dielectric over the optical aperture through a mechanical shadow mask that keeps the contact pads accessible. Its refractive index and thickness are chosen for the target optical band.
The essential material changes are junction isolation at the mesa edge, metal retained on the front cap, cap removed only from the optical aperture, and a conducting rear contact. The metal systems and anneal are a process design, not compositions specified by the drawing. A workable design must also qualify the passivation of etched sidewalls and the front-contact surface preparation.
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