Use the intrinsic definition of a Lévy process: almost surely, its increments over disjoint time intervals are independent, their probability distributions depend only on interval length, and has stochastic continuity. In symbols,
with times restricted to the half-line. Such a stochastic process has a càdlàg modification, and is usually represented by that version. Requiring càdlàg paths in the definition is a common equivalent convention at the level of modifications; it is important to distinguish this from a claim about the paths of an arbitrary supplied version.
For the characteristic function, write
Here and is the positive-time-sign characteristic exponent of a Lévy process. The independent increments and stationary increments give ; stochastic continuity gives continuity in time and . This continuous multiplicative semigroup has the stated exponential form. Its exponent has the Lévy–Khintchine formula
where , , and the Lévy measure satisfies . The truncation convention fixes the drift coefficient ; the displayed sign convention agrees with .
Construct a rate- Poisson process, for , from independent waiting times with exponential distribution . Put , , and . The strong law of large numbers gives , so there are only finitely many arrivals on each finite interval. Consequently the counting paths are càdlàg, and almost surely.
At any deterministic time , the memorylessness of the exponential distribution says that the residual waiting time has again exponential distribution and is independent of the observed history. Subsequent waiting times are fresh independent copies. Thus the Poisson process restarts independently at , proving independent increments and stationary increments. Integrating the joint waiting-time densities over gives
so its time values have the expected Poisson distribution.
For ,
Together with stationary increments, this gives stochastic continuity at every time, from either side where applicable. All the Lévy process requirements hold, and
For , the identically zero process gives the degenerate case.
First, convergence in probability at gives almost surely, since every . For any finite set of times, the corresponding vectors converge in probability: the union bound controls the probability that any coordinate differs by more than a fixed tolerance. The same holds for their increment vectors, hence also for their convergence in distribution.
For , set and . The characteristic function of a random vector factors for the independent increments of each :
Pass to the limit using convergence in distribution and bounded continuous functions. The resulting factorization of the characteristic function of a random vector, with the uniqueness theorem for characteristic functions, proves independence of the . Similarly passes to the limit, proving stationary increments for .
It remains to prove stochastic continuity. For , the triangle inequality and the union bound imply, for every fixed ,
The second term vanishes by stochastic continuity of . Now let and use the additional near-zero approximation hypothesis. We obtain in probability as . The stationary increments transfer this to every time: both and have the law of for when defined. Thus has all the intrinsic Lévy process properties, proving closure of Lévy processes under locally controlled convergence in probability.
If one requires the supplied process itself to be càdlàg, the hypotheses justify a càdlàg modification, rather than that stronger pathwise assertion. To see the distinction, take , let have uniform distribution on , and put . At each fixed time , almost surely, so both approximation hypotheses hold with zero error probability. Nevertheless every path has an isolated spike at and is not right-continuous there. Its identically zero modification of a stochastic process is a Lévy process with càdlàg paths. The conclusion is exact under the intrinsic definition, and exact up to modification under the convention requiring càdlàg paths.

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