Electron microscope resolution

Electron microscope resolution concerns distinguishable specimen detail under a specified contrast criterion. It depends on diffraction, lens defects, Electron energy spread, specimen motion and detection. A smaller de Broglie wavelength permits finer detail in principle, but neither wavelength nor magnification is the instrument's measured resolution.

For an Electron accelerated from negligible initial kinetic energy through a positive electric potential difference $U$, combine $K=eU$, the relativistic energy-momentum relation and the de Broglie wavelength:Here $h$ is the Planck constant, $m_e$ the Electron mass, $e$ the elementary charge, and $c$ the speed of light. This includes the relativistic correction omitted by the low-voltage electron accelerating-voltage wavelength approximation. With $m_e\simeq 9.1093837\times 10^{-31}\mathrm{kg}$ and SI defining values of $h,e,c$, calculated wavelengths are approximately $6.979$, $3.701$ and $1.969\mathrm{pm}$ at $30$, $100$ and $300\mathrm{kV}$ respectively. The rounded mass agrees with the recommended value.^[ref]

For a circular aperture admitting a small semi-angle $\alpha$, the Rayleigh criterion suggests a diffraction-limited resolution scale $d_D=0.61\lambda /\alpha$. At $100\mathrm{kV}$ and $\alpha =10\mathrm{mrad}$, this gives $0.226\mathrm{nm}$, already much larger than the $0.00370\mathrm{nm}$ wavelength. This is an ideal aperture estimate. Transmission electron microscopy with coherent illumination and a particular specimen requires its own image-contrast analysis; this scale alone is not a universal two-feature resolution test.

An original illustrative blur model adds competing effects:Define $C_s{\alpha }^3$ as a characteristic transverse blur from the electron-lens analogue of spherical aberration, and $C_c\alpha \Delta K/K$ as one from energy-dependent focusing, the analogue of chromatic aberration. The coefficients $C_s,C_c$ have units of length, $\Delta K$ is a chosen characteristic kinetic energy spread, and $b_0$ is a fixed residual blur. Adding their squares is a declared heuristic, not a measured point spread function or a rigorous resolution theorem. The model omits contrast transfer, specimen scattering and signal statistics, so its minimum is only an estimate within its assumptions.

Choose $C_s=C_c=1\mathrm{mm}$, $\Delta K=0.7\mathrm{eV}$ and $b_0=0.10\mathrm{nm}$ at $K=100\mathrm{keV}$. At $5\mathrm{mrad}$, the four contributions are about $0.452$, $0.125$, $0.035$ and $0.100\mathrm{nm}$, giving $b\simeq 0.480\mathrm{nm}$. At $10\mathrm{mrad}$, the diffraction contribution falls to $0.226\mathrm{nm}$ but the assumed spherical aberration contribution grows to $1.00\mathrm{nm}$. Thus opening the aperture indefinitely worsens this model's image. All these values are calculations with chosen parameters, not observations of any microscope.