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Use Coulomb's law in vacuum, $F=q_1{q}_2/(4\pi {ϵ}_0{r}^2)$. The constant $4\pi$ is dimensionless, so the vacuum-permittivity dimension isThus the physical dimension of vacuum permittivity follows directly from the dimensions of electric charge, force, and separation.

In electrostatics, Gauss's law is ${\oint }_{\partial \Omega }\mathbf{E}\cdot \mathbf{n}dS=Q_{\mathrm{enclosed}}/{ϵ}_0$, or locally $\nabla \cdot \mathbf{E}={\rho }_e/{ϵ}_0$, where ${\rho }_e$ is charge density and ${ϵ}_0$ is vacuum permittivity. Spherical symmetry makes the electric field radial, and Gauss's law givesChoose the additive constant of the electrostatic potential by $\varphi (\infty )=0$. Using $\mathbf{E}=-\nabla \varphi$ and continuity of potential across each charged shell givesThe field jumps at the shell surfaces, so the displayed formulas are for the requested open regions. The potential difference of the spherical capacitor is $\Delta \varphi =Q(1/a-1/b)/(4\pi {ϵ}_0)$. Thus its capacitance and electrostatic energy areThe energy follows either by charging work ${\int }_0^{Q}q/Cdq$, or directly from $W=({ϵ}_0/2)\int |\mathbf{E}{|}^2{d}^{3}x=Q^2(1/a-1/b)/(8\pi {ϵ}_0)$.

Permittivity describes a medium's response to an electric field. In a linear isotropic medium, the electric displacement is $\mathbf{D}=ϵ\mathbf{E}$; vacuum permittivity is its vacuum value ${ϵ}_0$.